Electron microscope observation system and observation method

ABSTRACT

An electron microscope observation system and an observation method are provided. According to one aspect of the invention, an observation appointment and approval screen is displayed on the two image display units, and the sample preparation-processed in the observation center side based on an instruction given from the operation center is loaded, and observation of the sample is executed based on sample observation condition information to output image information, and the observation image is displayed on the two image display units, and charge processing is executed based on a content level of the observation including preparation processing of the sample and occupying hours of the electron microscope to display the charge processing result.

TECHNICAL FIELD

The present invention relates to an electron microscope observationsystem, and particularly to a charge requisition system when an electronmicroscope is used through remote operation.

BACKGROUND ART

An example of using an electron microscope through remote operation isdisclosed in Japanese Patent Application Laid-Open No.9-63529. Thegazette discloses an electron microscope observation system comprisingan electron microscope main body; a converting unit for convertingvarious electron beam scanning speeds to an image scanning speed, andmaking the image scanning speed in synchronism with a transmission path;an analogue-digital converter for converting analogue image signals todigital image signals; a digital-analogue converter for digital imagesignals to analogue image signals; and an image display unit fordisplaying electron microscope image signals, and further comprising anelectron microscope operation unit for performing operation of moving asample stage, operation of changing the magnification and operation offocusing of the electron microscope main body; and an operation signalinput unit for inputting the operation control signal to the electronmicroscope operation unit.

DISCLOSURE OF INVENTION

An object of the present invention is to provide an electron microscopeobservation system and an electron microscope observation method whichcan reduce initial investment, and can eliminate burden of maintenanceof the apparatus, and can easily and appropriately perform preparationof a sample.

The present invention provides an electron microscope observation systemcomprising an electron microscope, an image display unit of an electronmicroscope center side for displaying an image of image signals obtainedby irradiating electrons on a sample using the electron microscope, atransmission path for transmitting the image signals and an imagedisplay unit of an operation center side for displaying a screen of theelectron microscope by the image signals, and performing operation ofmoving a sample stage, operation of changing magnification and operationof focusing of the electron microscope, wherein the electron microscopeobservation system displays an observation appointment and approvalscreen on the two image display units, specifying observation conditionsof the sample from the operation center side to the observation centerside through the transmission path, executing observation of the sampleprocessed based on the observation conditions in the observation centerside to output image information, displaying the observation image onsaid two image display units, also displaying a content level of theobservation including the observation conditions of the sample andoccupying hours of the electron microscope on the two image displayunits. The electron microscope observation system also executes chargeprocessing based on the content level and the occupying hours anddisplays the charge processing result depending on cases. The“specifying” described above includes setting of observation conditionsor instructing observation conditions to the observation center side.

Further, the present invention provides an electron microscopeobservation method using an electron microscope observation systemdisplaying an image of image signals obtained by irradiating electronson a sample using an electron microscope, the method comprising thesteps of displaying an observation appointment and approval screen ontwo image display units in an observation center side and in anoperation center side, sending the sample and sample preparationprocessing information on the sample from the operation center to theobservation center, executing preparation processing of the sample inthe observation center, displaying an observation image obtained basedon observation condition information including the preparationprocessing of the sample and by remote operation from the operationcenter on the two image display units, and executing charge processingbased on a content level of the observation including the preparationprocessing of the sample and occupying hours of the electron microscope,and further displaying the processing result.

According to the system and the method described above, a client canobtain an image by operating as if the client owned an electronmicroscope such as a TEM always under the best condition of theequipment without installing the equipment and without performingmaintenance of the equipment. Further, since the client can ask theobservation center side to perform preparation of the sample, the clientcan not only keep his working place safe and clean, but can smoothlyobtain image information under an accurate operation condition becausethe client can receive an consultation advice from a person of theobservation center side skilled the operation.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a block diagram showing the structure of an embodiment inaccordance with the present invention.

FIG. 2 is a view showing the outer appearance of an image display unit.

FIG. 3 is a view showing the outer appearance of the image display unitand a PC.

FIG. 4 is a flowchart.

FIG, 5 is a diagram showing the network of the electron microscopeobservation system

BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment in accordance with the present invention will be describedbelow, referring to the accompanied drawings.

FIG. 1 is a block diagram showing the structure of an embodiment inaccordance with the present invention.

The electron microscope observation system in accordance with thepresent invention is composed of an observation system 1 having anelectron microscope installed, an operation system 2 for performingremote operation of the electron microscope and a communication system 3for connecting the both with digital communication.

As the electron microscope, a TEM (a transmission electron microscope),a SEM (a scanning microscope) an electron probe micro-analyzer aretypical, but here description will be made taking the TEM 4 as anexample.

The observation system 1 is owned by an observation center side (anequipment supplier side) of a manufacture/dealer or a lender of the TEM4. The operation system 2 is owned by an operation center side (a clientside) of a user. The operation system 2 itself may be owned by theobservation center side.

An existing communication system, for example, a telephone (ISDN) line,a wireless line or the Internet may be used as the communication system3.

The facility and the equipment for sending and receiving digital imagesignals may be owned by the observation center side.

The observation system 1 comprises the TEM 4 described above, a computer(CPU) 5 as an information processing unit and an image display unit 6such as a TV receiver or the like, and the TEM 4 is controlled by thecomputer 5, and the screen display on the image display unit 6 is alsocontrolled by the computer 5.

The operation system 2 comprises an image display unit 7 such as a TVreceiver or the like and a computer 8, and the image display unit 7 iscontrolled by the computer 8.

The observation system 1 displays image information obtained from theTEM 4 on the image display unit 6, and the image information isconverted to signals suitable for transmission by a converting unit 11and then converted to digital signals by an analogue-digital converter14 to be output to a transmission path 13. A digital-analogue converter14 receives the digital signals from the transmission path 13, andconverts the digital signals to an analogue signals of signals fordisplay to display on the image display unit 7. The digital signals maybe used so as to be directly displayed. In the case of the TEM, a TVcamera for converting the image to electric signals is used. The signalsconverted to video signals by the converting unit 11 are converted todigital data to be sent to the transmission path 13.

As the analysis client of the operator in the operation system sideobserves the sample and controls changing the observation position, themagnification and so on by using the TEM 4 of the observation system 1through the communication system 3, the image is displayed on the imagedisplay unit 7 of the operation system 2 installed at a remote place,and the analysis client can observe the image on the image display unit7 at hand. The analysis client can directly obtain a desired image athand by selecting an image to be analyzed having a required position anda required magnification using the computer 8 and by taking a photographof the image using the operation system 2. The instruction informationdirectly operated by the analysis client is transmitted as digitalsignals through the transmission path 13 to be able to perform themovement operation of the sample stage, the changing operation of themagnification and the focusing operation.

Description will be made below on the method that the analysis clientperforms by himself observation of the desired image having a positionand a magnitude to be analyzed using the TEM of the observation centerside without installing the equipment such as the TEM.

A request of research and analysis 21 on a sample is proposed from aperson in charge in the client side. An analysis client 22 of the clientside is notified of the request. The analysis client 22 (1) sends asample to be observed to the observation center side as a sample 23, and(2) makes an observation appointment and an instruction of work contentsfor use of the TEM using the transmission path 13. In a case where alarge number of and various kinds of instruments such as TEMs areinstalled in the observation center side, the analysis client makes anappointment by notifying the observation center side of a desired TEM tobe used. The observation center side performs the approval and theconfirmation of appointment, and notifies the analysis client 22 of thecontents of execution plan using the transmission path 13.

If the analysis client 22 agrees to the contents of the execution plane,the observation center side classifies the sample based on a level ofthe contents of observation whether the sample is observed with orwithout preparation processing. In the case where the sample is observedwithout sample preparation processing, the sample is directly loaded 24into the TEM. In the case where the sample is observed with samplepreparation processing, the sample preparation processing 27 isperformed. The sample preparation processing is selected from microtome,FIB processing, etching and etc. depending on the level of observationcontents. As described above, the preparation-processed sample is loaded24 into the TEM. The observation center side performs maintenance 25 ofthe TEM and performs advice 26 of axial alignment. When the sample isloaded into the TEM, the observation center side notifies the analysisclient 22 that the observation is ready. (4) The analysis client 22remotely operates an electron microscope operating apparatus provided tothe TEM 4 using the computer 8 and further using the computer 5 toperform observation of the sample by setting the position to be analyzedand the magnification. This operation is executed in a form of operationcommand or voice/file command through the transmission path 13.

An image observed by the TEM 4 is displayed on the image display unit 6as described above, and the image display unit 7 through thetransmission path 13 as the same picture. Since the observed image isdisplayed as the same picture, the operation instruction of the analysisclient 22 can be appropriately executed.

The occupying hours of the TEM for the observation, that is, theanalysis hours are statistically processed to add up occupying hours(statistical processing 31). Further, a charge system corresponding tocontent levels of the sample preparation processing is determined by thecontents of contract 32, and the contents are stored 33 in a memoryunit, not shown. The content levels are input to a processing means ofthe computer 5 corresponding to the contents of observation. Thecomputer 5 executes charge processing 34 for demanding the chargeaccording to the content level and the occupying hours. The costrequired for maintenance of the equipment and the advice of axisalignment are reflected to the contents of contract 32. Furthermore,whether the observation system 1 or the operation system 2 is owned bythe observation center side or the client side and the analysis workingperiod are reflected to the contents of contract. The urgency of theanalysis may be reflected to the contents of contract.

FIG. 2 shows the image display unit 6 or 7 installed in the observationcenter side or in the operation center side in a case where thetransmission path such as ISDN or the like is used. On a screen 61, thecontents of screen for executing the appointment and the approval ofobservation through a keyboard 60 are displayed, and display of a TEMimage is also displayed. An X-stage movement instruction portion 63 anda Y-stage movement instruction portion 64 are arranged in an upperportion and a side portion of the screen 61, respectively. Further, amagnification display 65 is also arranged in the screen 61. Stageposition display portions 66 are also arranged in a lower portion of thescreen 61. Further, a focusing portion 67 and a stigma alignment portion68 are arranged at positions under the stage position display portions66. A magnification change display portion 69 is arranged beside thefocusing portion 67 and the stigma alignment portion 68. In theconfiguration described above, the appointment and the approval ofobservation are performed according to the items displayed on the screen61, and the transmission of the observation information conditionsincluding sample preparation processing conditions to the image displayunit 6 of the observation center is also performed by displaying theinformation on the screen. An image record portion 70 is arranged in aside portion of the screen 61 so as to display recorded file names. Aconnection time display portion 71 for displaying occupying hours of theTEM is arranged in an upper portion of the screen, and a processedresult display portion 72 for displaying a result of the chargeprocessing, for example, for displaying a rank or directly a charge foruse is arranged under the processed result display portion 72. Theconnection time is the occupying hours of the electron microscope.Instead of the connection time actually measured, an amount of consumedelectric power or number of images may be displayed, but the hours spentat analysis work here includes the amount of consumed electric power ornumber of images.

By connecting the image display units 6 and 7 to each other through thetransmission path 13, for example, through ISDN, the TEM image can bedisplayed on both of the image display units 6 and 7 almost in realtime.

FIG. 3 shows the image display units 6 or 7 installed in the observationcenter side or in the operation center side in a case where a dedicatedtransmission path of image-only use is provided. A dedicated operatingtable 75 comprises an X-stage movement instruction portion 76, a Y-stagemovement instruction portion 77, a focusing portion 78, a stigmaalignment portion 79, a magnification change instruction portion 80 anda recording button 81. A sample tilting instruction portion and arotation instruction portion may be arranged. An image 83 transmittedthrough a dedicated TV transmission path is displayed on a screen 82.

A personal computer 91 is composed of a main body portion 92 and akeyboard 93, and a stage position display 95, a magnification display96, an image record display 97 and a connection time display and/or acharge processing result display 98 are arranged in a screen 94.

As described above, by providing the dedicated transmission path ofimage-only use, the TEM image can be displayed on the image displayunits 6 and 7 in real time.

FIG. 4 shows the flow in a case where observation is performed using theTEM as a single instrument, In the figure, the double frame boxindicates the operation center (the client side), and the single framebox indicates the observation center. The triple frame box indicates theboth,

Referring to the figure, a written request of the client iselectronically transmitted from the operation center (S1), and theobservation center side determines an execution of observation based onthe written request. A sample is sent to the observation center based onthe determination (S3), and contents of the work, for example,observation information conditions including a condition of samplepreparation processing such as a magnification instruction, a sampletilting instruction, a rotation instruction and so on are instructed(S4). The observation center side electronically transmits the contentsof execution plan (S5), and then the remote work is started. The remotework is basically proceeded by operating the computer 8 in the operationcenter side, but the observation center side cooperates with theoperation center side if necessary (S7). In a case of requiring samplepreparation processing, the preparation processing (for example, slicingby FIB) of the sample is performed (S6), and the remote work isperformed for the preparation-processed sample (S7). An obtained imageis electronically transmitted to the operation center side at once, andat the same time the charge processing based on the content level andthe occupying hours of the TEM is executed to make requisition of thecost (S8). By doing so, the necessary observation of the sample can beperformed without installing the TEM in the operation center side.

As well known, the preparation of TEM sample through the FIB (focusedion beam) method can fabricate a TEM sample of a specified positionhaving a high space resolution of micrometer order.

FIG. 5 is a block diagram showing the structure of an example in whichthe electron microscope observation system is networked. In thisexample, the observation system 1 in the observation center comprises alarge number of electron microscopes such as TEMs, SEMs, FIBs (here, theFIB is included in the concept of the electron microscope). Number ofthe instruments is set corresponding to number of clients. Further, theobservation center is connected by network 51 to analysis centers (A),(B), (C) which comprise special equipment, for example, an X-rayanalysis apparatus, an Auger analysis apparatus, a mass spectrometer oran ultra high voltage electron microscope. By doing so, the observationcenter supplies a sample to the analysis center to request the analysis.Therefore, the observation center can provide the operation centerthrough the communication system 3 with the results from the analysiscenter together with an image obtained from the electron microscope.

Form the observation center's viewpoint, the embodiment in accordancewith the present invention provides the following observation system andthe following observation method. That is, the embodiment in accordancewith the present invention provides the observation system in which theappointment of observation and approval screen is displayed on the imagedisplay unit 6, the sample preparation-processed in the observationcenter side based on the instruction given from the operation centerthrough the transmission path being loaded, the observation beingexecuted based on the sample observation condition information, theimage information being output, the observation image being displayed onthe image display unit 6, the charge processing being executed based onthe content level of observation including the preparation processing ofthe sample and the occupying hours of the electron microscope, theresult of the charge processing being displayed. The content levelincludes, in addition to the level of the observation, the initialinvestment of the electron microscope, the belonging of the ownership,the magnification, the requiring degree of man-hours, and includes eventhe concept of the role sharing that images up to a specified number areobtained by the observation center side, but the other images ofadditional number are obtained by the operation center side.

The embodiment in accordance with the present invention provides theobservation method which comprises the steps of displaying theappointment of observation and approval screen on the image display unit6, receiving the sample and the sample preparation processinginformation sent from the operation center, performing preparationprocessing of the sample, displaying the observed images obtained basedon the observation condition information including the preparationprocessing of the sample and by remote operation from the operationcenter on the image display unit, and executing the charge processingbased on the content level of observation including the preparationprocessing of the sample and the occupying hours of the electronmicroscope to display the result of the charge processing.

Form the operation center's viewpoint, the embodiment in accordance withthe present invention provides the following observation system and thefollowing observation method. That is, the embodiment in accordance withthe present invention provides the observation system in which theappointment of observation and approval screen is displayed on the imagedisplay unit 7, the conditions of the sample preparation processingperformed in the observation center side being instructed through thetransmission path, the image information being output by performingobservation based on the sample observation condition information, theobservation image being displayed on the image display unit 7, a resultof the charge processing being displayed, the result being obtained byexecuting the charge processing based on the content level ofobservation including the preparation processing of the sample and theoccupying hours of the electron microscope.

The embodiment in accordance with the present invention provides theobservation method which comprises the steps of displaying theappointment of observation and approval screen on the image display unit7, sending the sample and the sample preparation processing informationof the sample from the operation center to the observation center,instructing the observation center to perform the preparation processingof the sample, displaying the observation images obtained based on theobservation condition information including the preparation processingof the sample and by operation from the operation center on the imagedisplay unit, displaying a result of the charge processing which isobtained by executing the charge processing based on the content levelof observation including the preparation processing of the sample andthe occupying hours of the electron microscope.

1-8. (Canceled).
 9. A remote electron microscope comprising anobservation system for setting an observation condition for a computerwith an image display unit in an observation center by a computer withan image display unit in a remote operation center, and for performingoperation control of an electron microscope by said image display unitof said observation center transmitting an observed image to said imagedisplay unit of said operation center, and wherein said image displayunit of said remote operation center is arranged for displaying anobservation appointment and an observation approval screen and fordisplaying an image indicative of a preparation processing condition ofa sample transmitted separately; wherein said computer of said remoteoperation center being arranged for transmitting at least one image tosaid image display unit of said observation center through atransmission path; and wherein said computer of said observation centerbeing arranged for performing observation setting control of theelectron microscope by displaying said image transmitted from said imagedisplay unit of said observation center on said image display unit on ofsaid operation center and for performing observation setting control ofthe separately sent sample processed on the basis of the imageindicative of said preparation processing condition, and for displayingobservation image information for the separately sent sample processedaccording to observation setting of the electron microscope andobservation setting of the separately sent sample, preparation processof the separately sent sample and a charge processing informationpreliminarily determined on the basis of content level of observationand occupying hour of the electron microscope, on said image displayunit of said observation center for transmitting to said image displayunit of said operation center through the transmission path.